E. Forsen

Nanocantilever based mass sensor integrated with CMOS circuitry

Z.J. Davis, G. Abadal, E. Forsen, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Francesca Campabadal, Anja Boisen, G. Abadal, 2005 .

Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

Jaume Esteve, Francesca Campabadal, Anja Boisen, 2004 .

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

Jaume Esteve, Francesca Campabadal, Anja Boisen, 2004 .