Mark Bremer

The Factory Times April 2013

Courtney Couture, Melissa Vargas, Kristen Murphy, 2013 .

Fabrication of EUVL micro-field exposure tools with 0.5 NA

Mark Bremer, Luc Girard, Lou Marchetti, 2015, SPIE Optifab.

Integration of Virtual and Real Equipment Learning Tools Related to Sustainability Education

Mark Bremer, Elizabeth Rossi, Christopher Urban, 2013 .

Projection optics for EUVL micro-field exposure tools with 0.5 NA

Regina Soufli, Michael Goldstein, Patrick Naulleau, 2014, Advanced Lithography.

Implementation of a Neural Network-based In-Vehicle Engine Fault Detection System

Mark Bremer, 2014 .

Update on the SEMATECH 0.5 NA Extreme-Ultraviolet Lithography (EUVL) Microfield Exposure Tool (MET)

Dominic Ashworth, Regina Soufli, Michael Goldstein, 2014, Advanced Lithography.

Projection optics for extreme ultraviolet lithography (EUVL) micro-field exposure tools (METs) with a numerical aperture of 0.5

Dominic Ashworth, Regina Soufli, Michael Goldstein, 2013, Advanced Lithography.