Ranganathan Nagarajan

Modification of photoresist profile in lift-off process for MEMS application

Rakesh Kumar, Ranganathan Nagarajan, 2002, SPIE Micro + Nano Materials, Devices, and Applications.

Laterally Isolated Polysilicon Beam Process

Ajay Agarwal, Ranganathan Nagarajan, 2003, Int. J. Comput. Eng. Sci..

Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide

Ranganathan Nagarajan, Praveen Kumar Sampath, Muhamad Khairi Bin Safari, 2011 .

TSV interposer fabrication for 3D IC packaging

Vempati Srinivasa Rao, Li Hong Yu, C. T. Chong, 2009, 2009 11th Electronics Packaging Technology Conference.

Design, process integration and characterization of wafer level vacuum packaging for MEMS resonator

Aibin Yu, Li Shiah Lim, C S Premachandran, 2010, 2010 Proceedings 60th Electronic Components and Technology Conference (ECTC).

Sub-100 nm MOSFET fabrication with low temperature resist trimming process

Ranganathan Nagarajan, N. Balasubramanian, L. K. Bera, 2004 .

Development of dual-etch via tapering process for through-silicon interconnection

Ranganathan Nagarajan, R. Nagarajan, K. Prasad, 2007 .