Daehun Jeong

High-Resolution Capacitive Microinclinometer With Oblique Comb Electrodes Using (110) Silicon

Myung-Lae Lee, Sung-Sik Yun, Chang-Auk Choi, 2011, Journal of Microelectromechanical Systems.

Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers

Myung-Lae Lee, Gunn Hwang, Sung-Sik Yun, 2009 .