T. Muraho

Ion sheath evolution and plasma replenishment inside an 80-mm-diameter pipe for plasma-based ion implantation and deposition

K. Yukimura, Xinxin Ma, T. Muraho, 2003 .

Ion current distribution on a 200-mm-diameter disk target by titanium cathodic arc plasma-based ion implantation and deposition

K. Yukimura, Xinxin Ma, T. Ikehata, 2004 .

Effects of pressure on the structure of titanium nitride film in the preparation using metallic plasma-based ion implantation and deposition

K. Yukimura, T. Maruyama, M. Kumagai, 2003 .