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J. Kato
发表
Rapid Annealing Using Halogen Lamps
J. Kato, S. Iwamatsu, 1984 .
Phosphorus Diffusion Using Spin‐On Phosphosilicate‐Glass Source and Halogen Lamps
Y. Ono, J. Kato, 1985 .
The Effects of Fluorine Atoms in High‐Dose Arsenic or Phosphorus Ion Implanted Silicon
J. Kato, 1990 .