Y. Nakagawa
发表
H. Ikeda,
S. Zaima,
Y. Yasuda,
1997
.
Kenji Sato,
H. Ikeda,
S. Zaima,
2000
.
Kenji Sato,
H. Ikeda,
S. Zaima,
1999
.
H. Ikeda,
Y. Ishibashi,
S. Zaima,
1999
.
H. Izumi,
Y. Nakagawa,
S. Miyoshi,
1994,
International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM.
Seiki Goto,
N. Fukumuro,
S. Yae,
2023,
Journal of Electronic Materials.