R. Logan

Optical system for rapid materials characterization with the transient grating technique: Application to nondestructive evaluation of thin films used in microelectronics

J. Rogers, K. Nelson, M. Banet, 1997 .

High-precision film thickness determination using a laser-based ultrasonic technique

J. Rogers, K. Nelson, J. Knecht, 1998 .

Photothermal/photoacoustic method for in situ evaluation of radiation-hardened polyimide films

K. Nelson, A. Maznev, J. Megusar, 1997 .

Nondestructive Optical Characterization of Radiationhardened Polyimide Films

K. Nelson, A. Maznev, J. Megusar, 1996 .

Microelectronic film thickness determination using a laser-based ultrasonic technique

K. Nelson, J. Rogers, A. Maznev, 1996 .