D. Beale

Development of duplex nitrided and closed field unbalanced magnetron sputter ion plated CrTiAlN-based coatings for H13 aluminium extrusion dies

Shicai Yang, D. Teer, C. Selcuk, 2004 .

Optical Characterization of RF Inductively Coupled Plasmas

V. Kolobov, L. Mahoney, A. Wendt, 2002 .

Nonlocal electron kinetics in a low‐pressure inductively coupled radio‐frequency discharge

V. Kolobov, L. Mahoney, A. Wendt, 1994 .

Advanced model formulations for optical and process proximity correction

James P. Shiely, Michael L. Rieger, Daniel F. Beale, 2004, SPIE Advanced Lithography.