T. Morita

The Effect of Strain Distribution on Abnormal Grain Growth in Cu Thin Films

S. Tsukimoto, M. Moriyama, M. Murakami, 2004 .

Formation of Ti diffusion barrier layers in Thin Cu(Ti) alloy films

S. Tsukimoto, M. Moriyama, M. Murakami, 2005 .

The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films

S. Tsukimoto, M. Moriyama, M. Murakami, 2005 .