Keith W. Andresen

Micrascan III: performance of a third-generation catadioptric step-and-scan lithographic tool

David M. Williamson, David J. Cronin, Harry Sewell, 1997, Advanced Lithography.

New technique for optical lithography at low k-factors

Andrew W. McCullough, Harry Sewell, Keith W. Andresen, 1999, Advanced Lithography.

200/300-mm Micrascan IV 248-nm system for high-throughput and tight CD control applications

Keith W. Andresen, Geoffrey O'Connor, Javed Sumra, 2000, Other Conferences.

Micrascan III: 0.25-um resolution step-and-scan system

David M. Williamson, Gregg M. Gallatin, Christopher J. Mason, 1996, Advanced Lithography.