Seiichiro Kanno

The Visualization of Friction

Hikaru Inooka, Kohtaro Ohba, Koshi Adachi, 1992 .

Micro-mechanism of initiation of sliding

Koji Kato, Seiichiro Kanno, 1995 .

Prediction of clamping pressure in a Johnsen-Rahbek-type electrostatic chuck based on circuit simulation

Seiichiro Kanno, Ken Yoshioka, K. Kato, 2006 .

Controlling gate-CD uniformity by means of a CD prediction model and wafer-temperature distribution control

Toru Masuda, Seiichiro Kanno, T. Masuda, 2007 .