S. Wakabayashi

Two-dimensional silicon micromachined optical scanner integrated with a photodetector

Masaaki Ikeda, Hiroshi Goto, Minoru Sakata, 1995, Photonics West.

Study on mechanical characteristics of PZT thin film for sensors and actuators

Hiroshi Goto, Masaaki Ikeda, S. Wakabayashi, 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Microfocusing optical device using piezoelectric thin-film actuator

Hiroshi Goto, Masaaki Ikeda, S. Wakabayashi, 1995, Photonics West.

Basic Characteristics Of A Piezoelectric Buckling Type Of Actuator

Hiroshi Goto, S. Wakabayashi, Masashi Takeuchi, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor

S. Wakabayashi, Koichi Imanaka, Masashi Takeuchi, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.