F. Oda

Surface Reaction Enhancement by UV irradiation during Si Etching Process with Chlorine Atom Beam

S. Samukawa, B. Jinnai, Y. Morimoto, 2007 .

Improvement of KHI FEL device at FEL-SUT

H. Kuroda, M. Kawai, K. Nomaru, 2003 .

Performance of the thermionic RF gun injector for the linac-based IR free electron laser at the FEL-SUT

Kawai Masayuki, F. Oda, M. Sobajima, 2001 .

Techniques for Measuring Rate Constants for Acid Generation from PAG (Photo Acid Generator) during ArF Exposure

Yoshiyuki Kono, Fumihiko Oda, Yukihiro Morimoto, 2008 .

Mechanisms of sound generation during flash lamp operation

Fumihiko Oda, Y. Morimoto, T. Kitagawa, 2005 .