E. Kassel
发表
R. Seltmann,
B. Schulz,
J. Paufler,
2005,
ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005..
S. Manakli,
L. Pain,
W. Pilz,
2008,
SPIE Advanced Lithography.
R. Goldenberg,
P. Izikson,
E. Kassel,
2004,
IEEE Transactions on Semiconductor Manufacturing.
E. Kassel,
M. Ghinovker,
A. Ueno,
2004,
IEEE Transactions on Semiconductor Manufacturing.