C. Bode

Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities

Christopher A. Bode, Juergen Hahn, Thomas F. Edgar, 2000, Autom..

Increasing reusability of Critical Zone data with CUAHSI HydroShare and CZ Manager

W. McDowell, D. Lubinski, M. Leon, 2019 .

Run-to-run control and performance monitoring of overlay in semiconductor manufacturing

Christopher A. Bode, Thomas F. Edgar, B. S. Ko, 2002 .

Model-based control in microelectronics manufacturing

Thomas F. Edgar, W. J. Campbell, C. Bode, 1999, Proceedings of the 38th IEEE Conference on Decision and Control (Cat. No.99CH36304).

Recursive least squares estimation for run-to-run control with metrology delay and its application to STI etch process

S.J. Qin, Q.P. He, Jin Wang, 2005, IEEE Transactions on Semiconductor Manufacturing.