Sven Jug

Integrated production overlay field-by-field control for leading edge technology nodes

Chen Li, Young Ki Kim, John C. Robinson, 2014, Advanced Lithography.

Automatic calibration of lithography simulation parameters

Chris A. Mack, Jeff D. Byers, Sven Jug, 2001, Microelectronic and MEMS Technologies.

The 3rd Stratego Computer World Championship

Maarten P. D. Schadd, Sven Jug, 2009 .

Mask registration and wafer overlay

Frank Laske, Klaus-Dieter Roeth, John C. Robinson, 2010, Advanced Lithography.

Automatic calibration of lithography simulation parameters using multiple data sets

Chris A. Mack, Sven Jug, Jeffrey D. Byers, 2002 .

Data analysis for photolithography

Chris A. Mack, Sven Jug, Dale A. Legband, 1999, Advanced Lithography.

Metrology and analysis of two-dimensional SEM patterns

Chris A. Mack, Scott R. Williams, Mike Pochkowski, 2001, SPIE Advanced Lithography.

Data analysis for photolithography

Chris A. Mack, Sven Jug, Dale A. Legband, 1999 .