Mauricio Cordero

An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology

Hiroyuki Fujita, Edin Sarajlic, Christophe Yamahata, 2009 .

Three-Phase Electrostatic Rotary Stepper Micromotor With a Flexural Pivot Bearing

E. Sarajlic, H. Fujita, C. Yamahata, 2010, Journal of Microelectromechanical Systems.

HAREM: high aspect ratio etching and metallization for microsystems fabrication

H. Fujita, D. Collard, E. Sarajlic, 2008 .