S. Tahara

发表

Vasile Paraschiv, W. Boullart, Eiichi Nishimura, 2013, Advanced Lithography.

Fujio Irie, Fumio Sumiyoshi, F. Sumiyoshi, 1981 .

Yuichi Ogawa, Junji Morikawa, Shigeru Tahara, 1999 .

K. Croes, F. Lazzarino, J. Bommels, 2015, 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).

Roel Gronheid, Boon Teik Chan, Nadia Vandenbroeck, 2013, Advanced Lithography.