B. Agius

Large Area Deposition of Device Quality SiO2 for Poly Si TFT Fabrication

O. Huet, P. Legagneux, T. Kretz, 1993, ESSDERC '93: 23rd European solid State Device Research Conference.

Low temperature (

Characterization of Silicon Nitride Films Deposited on GaAs by RF Magnetron Cathodic Sputtering Effects of Power Density and Total Gas Pressure

T. Carriere, B. Agius, P. Alnot, 1990 .

Low-temperature (≤600°C) polysilicon thin-film transistors

O. Huet, Pierre Legagneux, F. Plais, 1994 .