Premkumar Panneerchelvam

Modeling of thermalization phenomena in coaxial plasma accelerators

L. Raja, V. Subramaniam, Premkumar Panneerchelvam, 2018 .

Computational modeling of a single microdischarge and its interactions with high frequency electromagnetic waves

L. Raja, R. Upadhyay, Premkumar Panneerchelvam, 2016 .

Process optimization for shallow trench isolation etch using computational models

P. Ventzek, Chad M. Huard, Shyam Sridhar, 2023, Advanced Lithography.

Evolution of lithography-to-etch bias in multi-patterning processes

A. V. Pret, F. Lazzarino, R. Gronheid, 2022, Journal of Vacuum Science & Technology B.