Andrei Sabac

发表

Interferometry system for out-of-plane displacements and microshape measurements of silicon membranes

Christophe Gorecki, Michal Jozwik, Andrei Sabac, 2003, Optoelectronic and Electronic Sensors.

Development and investigation of high resolution resonant pressure sensor with optical interrogation

Christophe Gorecki, Michal Jozwik, Thierry Dean, 2005, SPIE Optical Metrology.

Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture

Christophe Gorecki, Thierry Dean, Andrei Sabac, 2003, SPIE Optical Metrology.

Optical interferometry investigation of internal stress and optomechanical characteristics of silicon-oxynitride thin films fabricated by PECVD

Christophe Gorecki, Michal Jozwik, Andrei Sabac, 2002, Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS.

Silicon oxynitride waveguides developed for optomechanical sensing functions

Christophe Gorecki, Michal Jozwik, Andrei Sabac, 2003, Photonics Fabrication Europe.

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a moveable micromirror

Christophe Gorecki, Andreas Bertz, Andrei Sabac, 2004, SPIE MOEMS-MEMS.

Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films

Christophe Gorecki, Michal Jozwik, Malgorzata Kujawinska, 2004, SPIE Optics + Photonics.

Interferometry system for the mechanical characterization of membranes with silicon oxynitride thin films fabricated by PECVD

Christophe Gorecki, Michal Jozwik, Andrei Sabac, 2003, Photonics Fabrication Europe.

Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer

Christophe Gorecki, Andreas Bertz, Thierry Dean, 2005, SPIE MOEMS-MEMS.

Characterization of internal stress of silicon oxinitride thin films fabricated by plasma-enhanced chemical vapor deposition: applications in integrated optics

Christophe Gorecki, Michal Jozwik, Andrei Sabac, 2001, International Symposium on Photonics and Applications.

Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide

Christophe Gorecki, Andrei Sabac, Lukasz Nieradko, 2003, Photonics Fabrication Europe.

Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

Christophe Gorecki, Michal Jozwik, Thierry Dean, 2004, SPIE Photonics Europe.