Naruhiro Itadani

Ion conducting properties of hydrogen-containing Ta2O5 thin films prepared by reactive sputtering

M. Kawamura, Y. Abe, K. Sasaki, 2008 .

Preparation of Hydrogen-Containing Ta2O5 Thin Films by Reactive Sputtering Using O2+H2O Mixed Gas

M. Kawamura, Y. Abe, K. Sasaki, 2007 .