Sergio A. Ajuria

Scaling of poly-encapsulated LOCOS for 0.35 /spl mu/m CMOS technology

Prashant Kenkare, Carlos A. Mazure, James D. Hayden, 1994 .

Furnace grown gate oxynitride using nitric oxide (NO)

Sergio A. Ajuria, Rama I. Hegde, Philip J. Tobin, 1994 .

Evaluation of Interfacial Nitrogen Concentration of RTP Oxynitrides by Reoxidation

Jimmy C. Liao, Sergio A. Ajuria, Rama I. Hegde, 1993 .

Furnace formation of silicon oxynitride thin dielectrics in nitrous oxide (N2O): The role of nitric oxide (NO)

Sergio A. Ajuria, Philip J. Tobin, Yoshio Okada, 1994 .

Growth and surface chemistry of oxynitride gate dielectric using nitric oxide

Sergio A. Ajuria, Rama I. Hegde, Philip J. Tobin, 1995 .