John Francis Valley

The Transition to Optical Wafer Flatness Metrology

John Francis Valley, Noel Poduje, 2003 .

Measurement of electro-optic poling transient effects in polymer thin films

J. W. Wu, John Francis Valley, 1990, Optics & Photonics.

Interferometric metrology of wafer nanotopography for advanced CMOS process integration

John Francis Valley, Chris L. Koliopoulos, Shouhong Tang, 2001, SPIE Optics + Photonics.

Nanotopography metrology for leading edge 300-mm process integration

John Francis Valley, Chris L. Koliopoulos, Todd Templeton, 2002, SPIE Advanced Lithography.

Wafer Nanotopography Effects on CMP: Experimental Validation of Modeling Methods

Duane S. Boning, John Francis Valley, Noel Poduje, 2001 .

Modeling and Mapping of Nanotopography Interactions with CMP

Duane S. Boning, John Francis Valley, Noel Poduje, 2002 .