L. W. Irwin

Frequency dependence of the lifetime of a surface micromachined microengine driving a load

D. M. Tanner, Kenneth A. Peterson, Paiboon Tangyunyong, 1999 .

The effect of frequency on the lifetime of a surface micromachined microengine driving a load

D. M. Tanner, Kenneth A. Peterson, Paiboon Tangyunyong, 1998, 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173).

Effect of W coating on microengine performance

W. M. Miller, D. Laván, M. Dugger, 2000, 2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059).

Selective W for Coating and Releasing MEMS Devices

Jeremy A. Walraven, James G. Fleming, Danelle M. Tanner, 1999 .

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Jeremy A. Walraven, Kenneth A. Peterson, Danelle M. Tanner, 2000 .

The effect of humidity on the reliability of a surface micromachined microengine

D. M. Tanner, Jeremy A. Walraven, Danelle M. Tanner, 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).