Florian Fern

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Stefan Sinzinger, Carsten Reinhardt, Johann Reger, 2021, Nanomanufacturing and Metrology.

Efficient empirical determination of maximum permissible error in coordinate metrology

R. Leach, A. Thompson, N. Southon, 2021, Measurement Science and Technology.

Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base

G. Eichfelder, E. Manske, R. Füßl, 2020 .

In-situ-Messung von Bewegungsabweichungen serieller Rotationsachsen zur Anwendung in Nanomessmaschinen / In situ error measurement of serial rotational devices for the application in nano coordinate measuring machines

R. Theska, E. Manske, R. Füßl, 2019, tm - Technisches Messen.

Anwendungen eines fasergekoppelten chromatisch konfokalen Sensors in Nanopositionier- und Nanomessmaschinen / Applications of a fiber coupled chromatic confocal sensor in nanopositioning and nanomeasuring machines

S. Sinzinger, E. Manske, Florian Fern, 2019, tm - Technisches Messen.

Influence of additional rotational movements on the measurement uncertainty of nanomeasuring, nanopositioning and nanofabrication machines

René Theska, Roland Fuessl, Florian Fern, 2018 .

The implementation of ultra precision rotations to multiaxial nanofabrication machines: challenges and solution concepts

R. Theska, R. Füßl, F. Weigert, 2018 .