C. G. Faltermeier

Barrier Properties of Titanium Nitride Films Grown by Low Temperature Chemical Vapor Deposition from Titanium Tetraiodide

G. G. Peterson, A. Kaloyeros, D. Manger, 1997 .

Barrier Properties of Titanium Nitride Films Grown by Low Temperature Chemical Vapor Deposition from Titanium Tetraiodide.

A. Kaloyeros, D. Manger, A. Paranjpe, 1997 .