Mitsutomi Yamashita

Saturation adsorption reaction of cracked Si2H6 on Si(001) and Ge(001)

Y. Suda, Daiju Shiratori, Yasuhiro Misato, 1998 .

Ar+-laser-assisted subatomic-layer epitaxy of Si

Masahiro Ishida, Yoshiyuki Suda, Y. Suda, 1996 .

Sub-atomic-layer epitaxy of Si using Si2H6

Y. Suda, M. Ishida, H. Ikeda, 1994 .