S. Dakshina-Murthy

Metal gate MOSFETs with HfO/sub 2/ gate dielectric

P. Abramowitz, P.J. Tobin, E. Luckowski, 2002, 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303).

Dual-metal gate CMOS with HfO2 gate dielectric

P. Abramowitz, J. Conner, E. Luckowski, 2002, Digest. International Electron Devices Meeting,.

A novel approach for the patterning and high-volume production of sub-40-nm gates

J. Klais, H. Ruelke, R. Stephan, 2005, IEEE Transactions on Semiconductor Manufacturing.

CMOS-compatible planar silicon waveguide-grating-coupler photodetectors fabricated on silicon-on-insulator (SOI) substrates

Joe C. Campbell, S. Dakshina-Murthy, Sebastian Csutak, 2002 .

Physical and electrical properties of metal gate electrodes on HfO2 gate dielectrics

Bich-Yen Nguyen, Raghaw Rai, M. Zavala, 2003 .