W. Häβler-Grohne

Calibration of test masks used for lithography lens systems

M. Arnz, B. Bodermann, W. Häβler-Grohne, 2006, European Mask and Lithography Conference.

Systematic investigation of CD metrology tool response to sidewall profile variation on a COG test mask

C. G. Frase, J. Richter, B. Bodermann, 2006, European Mask and Lithography Conference.