T. Akiyama

Measurement of hydrogen radical concentration for a hydrogen pressure range from 0.01 to 30 Torr

H. Komiyama, N. Tsuji, T. Akiyama, 1995 .

Characteristics of the hot-wire CVD reactor on a-Si:H deposition

H. Komiyama, N. Tsuji, T. Akiyama, 1996 .

Measurement of the concentration of hydrogen radicals and their recombination probability on a-Si:H

H. Komiyama, N. Tsuji, T. Akiyama, 1996 .