Min Su Kim

Adhesion and removal behavior of particulate contaminants from EUV mask materials

Min-Su Kim, Jin-Goo Park, M. Purushothaman, 2017 .

Reconstruction of Mandibular Defects With Bone Marrow-Derived Stem Cells in Odontogenic Myxoma.

H. Lim, Jun Lee, B. Kim, 2020, The Journal of craniofacial surgery.

Investigation of oxide layer removal mechanism using reactive gases

D. Ko, Jin-Goo Park, H. Oh, 2015 .

Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution

Min-Su Kim, Jin-Goo Park, Hyun-Tae Kim, 2017 .

Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents

Young Woong Kim, Jinho Ahn, Min-Su Kim, 2018, Colloids and Surfaces A: Physicochemical and Engineering Aspects.

Acoustic Cavitation Behavior in Isopropyl Alcohol Added Cleaning Solution

A. Busnaina, H. Sohn, J. Jeong, 2012 .

Study on Aluminum Frame Surface Cleaning Process for Photomask Pellicle Fabrication

김현태, 박진구, 이준, 2015 .

Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography

Min-Su Kim, M. Ramachandran, Jin-Goo Park, 2014 .

Development of CO2 gas cluster cleaning method and its characterization

Soon-Bark Kwon, Taesung Kim, Hoomi Choi, 2013 .