Alfred Lechner

A Study on the Structure Collapse Mechanisms for High Aspect Ratio Structures with Application to Clean Processing

Daniel Peter, Frank Holsteyns, Michael Dalmer, 2009 .

Isotropic wet chemical etching of deep channels with optical surface quality in silicon with HNA based etching solutions

Alfred Lechner, Michael Bauhuber, Andreas Mikrievskij, 2013 .