Y.B. Tian

Slurry Flow Visualisation of Chemical Mechanical Polishing Based on a Computational Fluid Dynamics Model

Zhaowei Zhong, Y. B. Tian, S. T. Lai, 2012 .

Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer

Y. Mikami, Libo Zhou, J. Shimizu, 2010 .

A Novel Single Step Thinning Process for Extremely Thin Si Wafers

J. Shimizu, H. Sato, Li Bo Zhou, 2009 .

Effects of Sodium Carbonate and Ceria Concentration on Chemo-Mechanical Grinding of Single Crystal Si Wafer

J. Shimizu, Y. Tashiro, H. Takahashi, 2009 .

Material Removal Mechanism of Chemo-Mechanical Grinding (CMG) of Si Wafer by Using Soft Abrasive Grinding Wheel (SAGW)

D. Guo, M. Lei, Li Bo Zhou, 2008 .

Study on Improvement of Material Removal Rate in Chemo-Mechanical Grinding (CMG) of Si Wafer

Yoshiaki Tashiro, Jun Shimizu, Libo Zhou, 2008 .