Michiharu Kirinuki

Effect of ion beam implantation on density of DLC prepared by plasma-based ion implantation and deposition

Tsuneo Suzuki, K. Yatsui, M. Yatsuzuka, 2006 .

Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition

E. Fujiwara, M. Yatsuzuka, K. Azuma, 2004 .

Negative pulsed voltage discharge and DLC preparation in PBIID system

E. Fujiwara, M. Yatsuzuka, K. Azuma, 2006 .

High Deposition Rate of Diamond-like Carbon on Trench Bottom for Acetylene Gas at Plasma Immersion and Deposition Process

E. Fujiwara, M. Yatsuzuka, K. Azuma, 2006 .