Daichi Marui

Increased doping depth of Al in wet-chemical laser doping of 4H-SiC by expanding laser pulse

Tanemasa Asano, Hiroshi Ikenoue, Akihiro Ikeda, 2017 .

Nitrogen doping of 4H-SiC by KrF excimer laser irradiation in liquid nitrogen

H. Ikenoue, T. Asano, A. Ikeda, 2014 .

Aluminum doping of 4H-SiC by irradiation of excimer laser in aluminum chloride solution

H. Ikenoue, T. Asano, A. Ikeda, 2014 .

Extremely Enhanced Diffusion of Nitrogen in 4H-SiC Observed in Liquid-Nitrogen Immersion Irradiation of Excimer Laser

H. Ikenoue, T. Asano, A. Ikeda, 2015 .