T. Ohba

Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar

T. Makabe, T. Kitajima, T. Ohmori, 2008 .

Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach

Wenbing Yang, K. Nojiri, K. J. Kanarik, 2017 .

Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

T. Makabe, T. Ohba, 2010 .

Predicting synergy in atomic layer etching

R. Wise, R. Gottscho, Wenbing Yang, 2017 .