D. Oezer

TaSiN nanocomposite thin films: Correlation between structure, chemical composition, and physical properties

R. Sanjinés, M. Rivera, S. Rodil, 2014 .

Electrical and optical properties of Ta-Si-N thin films deposited by reactive magnetron sputtering

R. Sanjinés, S. Rodil, G. Ramirez, 2012 .

Influence of bias voltage on the microstructure and physical properties of magnetron sputtered Zr–Si–N nanocomposite thin films

C. Sandu, R. Sanjinés, J. Patscheider, 2009 .