Nobuyoshi Hirotsu

8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE01 Mode Microwave

Masayoshi Tanaka, Y. Kawai, Toru Yamaguchi, 1993 .

Generation of electron cyclotron resonance plasmas using a circular TE01 mode microwave

Y. Kawai, N. Tanaka, Ryota Hidaka, 1992 .

Production Mechanism of a Large-Diameter Uniform Electron Cyclotron Resonance Plasma Generated by a Circular TE01 Mode Microwave

Y. Kawai, Toru Yamaguchi, Masayoshi Y. Tanaka, 1994 .