Roman Klein

发表

Characterization of large-area reference sources for the calibration of beta-contamination monitors

H. Janssen, Roman Klein, 1996 .

EUV time-resolved studies on carbon growth and cleaning

Thomas Bock, Marco Wedowski, Roman Klein, 2003, SPIE Advanced Lithography.

Molecular contamination mitigation in EUVL by environmental control

Hans Meiling, Frank Scholze, Eric Louis, 2002 .

Prevention of MoSi multilayer reflection loss in EUVL tools

Hans Meiling, Eric Louis, Marco Wedowski, 2001, SPIE Optics + Photonics.