Cheng-hsuan Kuo

Plasma Enhanced Atomic Layer Deposition of Crystallized Gallium Phosphide on Si with tri-Ethylgallium and tri-tert-Butylphosphine

A. Kummel, C. Winter, S. Ueda, 2023, Applied Surface Science.

Low Resistivity Titanium Nitride Thin Film Fabricated by Atomic Layer Deposition with TiCl4 and Metal-Organic Precursors in Horizontal Vias

J. Spiegelman, A. Kummel, V. Wang, 2022, 2022 IEEE International Interconnect Technology Conference (IITC).

Reverse Templating Effects of Low-Resistivity Ru ALD on Sputtered Ru

A. Kummel, R. Kanjolia, V. Wang, 2023, 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM).

Sub-Nanometer Interfacial Oxides on Highly Oriented Pyrolytic Graphite and Carbon Nanotubes Enabled by Lateral Oxide Growth.

G. Pitner, M. Passlack, A. Kummel, 2022, ACS applied materials & interfaces.