Mitsuo Saitoh

Atmospheric Pressure Plasma Treatment and Non-Flux Lead-Free-Soldering of Cu Wire and Strand

Akio Furusawa, K. Suetsugu, T. Okumura, 2006 .

Annealing performance improvement of elongated inductively coupled plasma torch and its application to recovery of plasma-induced Si substrate damage

K. Eriguchi, T. Okumura, H. Kawaura, 2014 .

Fine Pattern Etching of Silicon Substrates Using Atmospheric Line-Shaped Microplasma Source

I. Matsuda, T. Okumura, Mitsuo Saitoh, 2003, Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference.

Fine Pattern Etching of Molybdenum Thin Film and Silicon Substrate by Using Atmospheric Line-Shaped Microplasma Source

T. Kimura, T. Okumura, Mitsuo Saitoh, 2003 .