Min Xu

Metrological large range scanning probe microscope

Gaoliang Dai, Frank Pohlenz, Hans-Ulrich Danzebrink, 2004 .

Accurate and traceable measurement of nano- and microstructures

Gaoliang Dai, Frank Pohlenz, Ludger Koenders, 2006 .

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Hutomo Suryo Wasisto, Uwe Brand, Frank Pohlenz, 2018, Sensors and Actuators A: Physical.

Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography

E. Peiner, M. Fahrbach, U. Brand, 2023, Sensors.

Traceable Nanomechanical Metrology of GaN Micropillar Array

A. Waag, F. Pohlenz, E. Peiner, 2018, Advanced Engineering Materials.

Nanoscale surface measurements at sidewalls of nano- and micro-structures

Gaoliang Dai, Frank Pohlenz, Hans-Ulrich Danzebrink, 2007 .

Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

B. Cappella, E. Peiner, M. Fahrbach, 2021, Measurement: Sensors.