R. D. de Vries

A high-T/sub c/ superconductor bolometer on a silicon nitride membrane

Martin J. de Nivelle, M. Elwenspoek, P. D. de Korte, 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.