Hiroshi Yano Hiroshi Yano

Native Oxide Removal on Si Surfaces by NF3-Added Hydrogen and Water Vapor Plasma Downstream Treatment

H. Ogawa, S. Fujimura, J. Kikuchi, 1994 .

Effects of H2O on Atomic Hydrogen Generation in Hydrogen Plasma

Hiroshi Yano, Shuzo Fujimura, Masafumi Suzuki, 1993, Other Conferences.