K. Komachi

Affecting factors on surface‐wave‐produced plasma

K. Komachi, 1993 .

ELECTRIC FIELD IN SURFACE-WAVE-PRODUCED PLASMAS

K. Komachi, 1994 .

Gegeneration of a Microwave Plasma Using Traveling Waves

S. Kobayashi, K. Komachi, 1989 .

Resist ashing using surface-wave-produced plasmas

S. Kobayashi, K. Komachi, 1990 .