M. Hanazaki

Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

H. Ootera, K. Ono, M. Tuda, 2000 .

A Surface-Wave Plasma Source with Magnetic Multicusp Fields

K. Ono, M. Tuda, M. Tsuchihashi, 1998 .

Preparation of Morphology-Controlled Hydroxyapatite using Calcium Carbonate as Seeds

Y. Ueda, Takuya Nakajima, M. Hanazaki, 1998 .

Effects of O2 Addition on BCl3/Cl2 Plasma Chemistry for Al Etching

K. Ono, M. Tuda, T. Banjo, 1997 .