Hiraku Matsukuma

发表

Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage

Wei Gao, Masaya Furuta, Yuki Shimizu, 2018 .

A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

Tatsuya Ishikawa, Wei Gao, Xiuguo Chen, 2018, Sensors.

Error Separation Method for Precision Measurement of the Run-Out of a Microdrill Bit by Using a Laser Scan Micrometer Measurement System

Wei Gao, Yuki Shimizu, Yuan-Liu Chen, 2018 .

Accurate polarization control in nonorthogonal two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional scale gratings

Wei Gao, Yuki Shimizu, Kai Zhang, 2019 .

On-machine surface measurement by a force sensor integrated Fast Tool Servo

Yuki Shimizu, Hiraku Matsukuma, Bo Wen, 2019 .

Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage

Wei Gao, Yuki Shimizu, Ryo Ishizuka, 2018, 2018 IEEE International Conference on Advanced Manufacturing (ICAM).

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Wei Gao, Yuki Shimizu, Hiraku Matsukuma, 2019, Sensors.

Q-switched dual-wavelength pumped 3.5-μm erbium-doped mid-Infrared fiber laser

Shigeki Tokita, David J. Ottaway, Elizaveta Klantsataya, 2018, LASE.

A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe

Wei Gao, Taku Nakamura, Ryo Sato, 2019 .

Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source

Yuki Shimizu, Hiraku Matsukuma, Ryo Sato, 2021, Int. J. Autom. Technol..

An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation

Wei Gao, Yuki Shimizu, Hiraku Matsukuma, 2021, Italian National Conference on Sensors.

Improvement of a Stitching Operation in the Stitching Linear-Scan Method for Measurement of Cylinders in a Small Dimension

Yuki Shimizu, Yindi Cai, Hiraku Matsukuma, 2021, Applied Sciences.

Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement

Yuki Shimizu, Wei Gao, Hiraku Matsukuma, 2020, Nanomanufacturing and Metrology.

Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Wei Gao, Yuki Shimizu, Hiraku Matsukuma, 2019, Precision Engineering.

Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration

Wei Gao, Yuki Shimizu, Xiuguo Chen, 2018, Applied Sciences.

A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor

Wei Gao, Yuki Shimizu, Hiraku Matsukuma, 2019, Nanomanufacturing and Metrology.

Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam

Wei Gao, Yuki Shimizu, Hiraku Matsukuma, 2018 .

Integration of a Cr–N Thin-Film Displacement Sensor into an XY Micro-stage for Closed-Loop Nano-positioning

Wei Gao, Yuki Shimizu, Eiji Niwa, 2019, Nanomanufacturing and Metrology.

Actively Q-switched dual-wavelength pumped Er3+ :ZBLAN fiber laser at 3.47 µm.

Shigeki Tokita, Elizaveta Klantsataya, Hiraku Matsukuma, 2018, Optics letters.

An autocollimator with a mid-infrared laser for angular measurement of rough surfaces

Yuki Shimizu, Hiraku Matsukuma, Wei Gao, 2021 .

Correlation between laser absorption and radiation conversion efficiency in laser produced tin plasma

Hiroaki Nishimura, Shinsuke Fujioka, Atsushi Sunahara, 2015 .

Reduction in Cross-Talk Errors in a Six-Degree-of-Freedom Surface Encoder

Wei Gao, Yuki Shimizu, Xinghui Li, 2019, Nanomanufacturing and Metrology.