Surender Kumar

Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure

K. K. Jain, Isha Yadav, S. Dutta, 2019, Journal of Materials Science: Materials in Electronics.

Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review

B. D. Pant, S. Santosh Kumar, S. Kumar, 2014, Microsystem Technologies.

Process variation monitoring (PVM) by wafer inspection tool as a complementary method to CD-SEM for mapping LER and defect density on production wafers

Doron Meshulach, Shimon Levi, Kobi Kan, 2009, Advanced Lithography.

Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization

B. D. Pant, S. Santosh Kumar, Surender Kumar, 2015 .

Experimental evaluation of sensitivity and non-linearity in polysilicon piezoresistive pressure sensors with different diaphragm sizes

B. D. Pant, S. Santosh Kumar, Anuj K. Ojha, 2014, Microsystem Technologies.